1.上海交通大学;2.上海大学机电工程与自动化学院微电子研发中心;3.自然资源部第二海洋研究所海底地球科学重点实验室
国家重大科研仪器研制专项项目(42127807-03)，国家重点研发计划项目(2023YFC2811100, 2023YFC2811104)，上海交通大学“深蓝计划”基金重点项目（SL2022ZD202），国家自然科学基金（52107239），上海交通大学医工交叉研究基金（YG2023QNA40），上海市科委专业技术服务平台资助项目（19DZ2291103），上海高校青年东方学者岗位计划（QD2020009）
1.Shanghai Jiao Tong University;2.Shanghai University;3.Key Laboratory of Submarine Geosciences
National Major Scientific Instruments and Equipments Development Project of National Natural Science Foundation of China(42127807-03), National Key R&D Program of China (2023YFC2811100, 2023YFC2811104), The Oceanic Interdisciplinary Program of Shanghai Jiao Tong University (grant no. SL2022ZD202), The National Natural Science Foundation of China（52107239）, Interdisciplinary Program of Shanghai Jiao Tong University （YG2023QNA40）, Professional technical service platform of Shanghai Committee of Science and Technology (19DZ2291103), the Program for Young Eastern Scholar at Shanghai Institutions of Higher Education (QD2020009)
采用异质多维集成技术,开发了一种T型微型三分量磁通门传感器。该传感器集成了基于微机电系统(MEMS)技术制造的具有钴基非晶带芯和螺线管励磁检测线圈的单轴螺线管磁通门芯片,通过PCB基板的正交连接以及单轴磁通门芯片与基板的键合,实现了三分量的全集成。测试结果显示,传感器在X、Y、Z方向上的灵敏度分别为1068V/T、1072V/T和1069V/T,噪声功率谱密度分别为0.069nT√Hz@1Hz、0.136nT√Hz@1Hz和0.102nT√Hz@1Hz,时间漂移峰值分别为7.5nT、23.5nT和17.8nT,线性响应范围为0-100μT。正交度测试表明,该传感器X-Y、X-Z、Y-Z轴之间的正交偏差分别为0.5°、1°和0.5°,可以满足对地磁场三分量的有效测量。采用更精密的基板加工技术和更精准的键合对准符号图案可以进一步提高异质集成三分量磁通门传感器的正交度。这项研究为微型高精度磁场传感应用提供了重要的技术支持。
A T-shaped micro triaxial fluxgate sensor has been developed using heterogeneous multidimensional integration technology. The sensor integrates a uniaxial solenoid fluxgate chip fabricated using Micro-Electro-Mechanical Systems (MEMS) technology, which features a cobalt-based amorphous band core and an excitation detection coil. By orthogonally connecting through a PCB substrate and bonding the uniaxial fluxgate chip to the substrate, a fully integrated triaxial configuration was achieved. Test results show that the sensor"s sensitivities are 1068 V/T for the X axis, 1072 V/T for the Y axis, and 1069 V/T for the Z axis. The corresponding noise power spectral densities are 0.069 nT√Hz, 0.136 nT√Hz, and 0.102 nT√Hz at 1 Hz for each respective axis. Time drift peaks were recorded at 7.5 nT for X, 23.5 nT for Y, and 17.8 nT for Z, with a linear response range from 0 to 100 μT. Orthogonality tests revealed deviations of 0.5° between X and Y, 1° between X and Z, and 0.5° between Y and Z, meeting the standards for precise measurement of the geomagnetic field"s three components. Further improvements in the orthogonality of the heterogeneously integrated triaxial magnetic sensor can be achieved through more precise substrate machining and more accurate bonding alignment symbols. This research provides significant technical support for applications requiring small, high-precision magnetic field sensors.
